Series II Standard Mass Flow Controller - 601AVQAAD00V

Our Series II mass flow controllers & meters offer outstanding value in a wide range of applications. Exceptional accuracy for flow ranges from 0.014 sccm to 1,670 slpm, all with optional multi-gas and multi-range capability for maximum flexibility.
Availability: Backordered
SKU: 601AVQAAD00V
POR
Products specifications
Attribute nameAttribute value
DivisionPrecision Fluidics DivisionMaximum Operating Temperature70 °C
Minimum Operating Temperature-10 °CBody Material316L Stainless Steel
Specifications MetIP40Leak RateTested < 2 x 10-9 mbar l/s He L/sec
Repeatability< 0.2% ReadingTurndown Ratio1 : 50 (in digital mode up to 1 : 187.5)
Wetted Material316L Stainless SteelFlow Rate AccuracyStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)
Electrical Connection9-PIN D-CONNECTORTemperature CoefficientZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °C
Seal MaterialViton (Standard)Flow Rate20 - 75 L/min
Valve TypeNormally ClosedWarm-Up Time30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale
Settling TimeStandard: 2 - 4 secondsSurface Finish0.8 µm typical
Connection SizeNoneConnection TypeNone
Control Stability< ±0.1% Full Scale (typical for 1 l/min N2)Power ConsumptionMax. 320 mA; Add 50 mA Profibus, if applicable
Connection Material316L Stainless SteelAttitude SensitivityMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2
Power Supply Voltage+15 - 24 VdcPressure Coefficient0.1 ATM typical N2; 0.01% / ATM typical H2 ATM
Pressure Control Range928 PSIACommunication InterfaceRS232 + Analog 0 to 5 Vdc
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