Series II Standard Mass Flow Meter

*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

Parker's highly precise mass flow meters provide you the diagnostic stability and repeatability you need for low flow gas applications. Controlling thermal mass flow rates from 0.6 l/m to 1,670 l/m with high precision and <0.2% repeatability. Rated for 8 separate gas types which are customer field adjustable. Our thermal mass flow meter is available in both digital and analog styles, fully compatible with RS232 and digital protocols such as Profibus. If you're not sure what gas you're going to use or your process changes, our MFM allows you to migrate to a new gas within your flow range without purchasing a new mass flow meter.

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SKU	Availability	Price	Division	Maximum Operating Temperature	Minimum Operating Temperature	Body Material	Specifications Met	Leak Rate	Warm-Up Time	Repeatability	Surface Finish	Turndown Ratio	Wetted Material	Power Consumption	Flow Rate Accuracy	Connection Material	Attitude Sensitivity	Power Supply Voltage	Pressure Coefficient	Electrical Connection	Pressure Control Range	Temperature Coefficient
511BIAAD00V	Backordered	POR	Precision Fluidics Division	70 °C	-10 °C	316L Stainless Steel	IP40	Tested < 2 x 10-9 mbar l/s He L/sec	30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale	< 0.2% Reading	0.8µm typical	1 : 50 (in digital mode up to 1 : 187.5)	316L Stainless Steel	70 mA; Add 50 mA Profibus, if applicable	Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)	316L Stainless St eel	Max. error at 90° off horizontal 0.2% at I ATM, typical N2	+15 - 24	0.1% / ATM typical N2; 0.01% / ATM typical H2 ATM	9-PIN D-CONNECTOR	1450 PSIA	Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °C
511BIAAD22V	Backordered	POR	Precision Fluidics Division	70 °C	-10 °C	316L Stainless Steel	IP40	Tested < 2 x 10-9 mbar l/s He L/sec	30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale	< 0.2% Reading	0.8µm typical	1 : 50 (in digital mode up to 1 : 187.5)	316L Stainless Steel	70 mA; Add 50 mA Profibus, if applicable	Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)	316L Stainless St eel	Max. error at 90° off horizontal 0.2% at I ATM, typical N2	+15 - 24	0.1% / ATM typical N2; 0.01% / ATM typical H2 ATM	9-PIN D-CONNECTOR	1450 PSIA	Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °C
511BIABD22V	Backordered	POR	Precision Fluidics Division	70 °C	-10 °C	316L Stainless Steel	IP40	Tested < 2 x 10-9 mbar l/s He L/sec	30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale	< 0.2% Reading	0.8µm typical	1 : 50 (in digital mode up to 1 : 187.5)	316L Stainless Steel	70 mA; Add 50 mA Profibus, if applicable	Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)	316L Stainless St eel	Max. error at 90° off horizontal 0.2% at I ATM, typical N2	+15 - 24	0.1% / ATM typical N2; 0.01% / ATM typical H2 ATM	9-PIN D-CONNECTOR	1450 PSIA	Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °C

Series II Standard Mass Flow Meter

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