VSO Miniature Proportional Valve

*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

The Parker VSO® miniature proportional valve provides enhanced flow control for applications where precise control flow control is required up to 56 slpm. The VSO® valve provides precise flow control of gas in proportion to input current. The valve can be controlled with either DC current or pulse width modulation along with closed loop feedback to deliver optimal system performance. Together with its ability to provide precise control over varying temperatures and media types, the VSO® miniature proportional valve is ideally suited for manufacturers of medical and analytical equipment.

Markets

• Analytical Chemistry

• Anesthesia

• Patient Monitoring

• Respiratory

Features/Benefits

• Enables precise flow control for improved instrument accuracy

• Thermally compensated to maintain precise flow over a wide range of media

• Computer automated calibration and serialization for performance traceability

• Cleaned for Oxygen and Analytical Service use

• Proven performance tested to 100 million life cycles

• Reach, RoHS, ISO 15001, IP65, and CE compliant

Typical Applications

• Gas Chromatography

• Mass Spectrometry

• Ventilators

• 0₂ Concentrators / Conservers

• Anesthesia Delivery and Monitors

• Pressure & Flow Control

• Mass Flow Control

• Insufflator

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SKU	Availability	Price	Width	Height	Length	Weight	Function	Flow Rate	Leak Rate	Orifice Size	Body Material	Configuration	Input Voltage	Mounting Type	Seal Material	Actuation Type	Control Method	For Fluid Type	Operation Type	Connection Size	Connection Type	Shipping Weight	Maximum Flow Rate	Power Consumption	Max Order Quantity	Standard Lead Time	Cycles per Lifetime	Division	Industry Application	Thermal Compensation	Electrical Connection	Out of Stock Lead Time	Vacuum to Pressure Range	Maximum Operating Pressure	Maximum Operating Temperature	Minimum Operating Temperature	Body Style	Pneumatic Connection	Electrical Connection	Body/Elastomer Materials	Maximum Operating Voltage	Maximum Operating Pressure/Orifice Size
910-000047-037	Backordered	POR	15.9 mm	17.0 mm	45.3 mm	2.2 oz	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	20 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Pressure & Flow Control	Thermally Compensated	18" Wire Leads	40	27 Inch-Hg to Pressure Rating	3.45 bar	131 °F	0 °C	Manifold Mount	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FKM	20 VDC	50 psid/.065"
910-000047-038	Backordered	POR	0.63 inch	0.67 inch	45.3 mm	2.2 oz	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	20 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount with Screens	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Ventilators	Thermally Compensated	18" Wire Leads	40	686.0 mm-Hg to Pressure Rating	50 psi	55 °C	0 °C	Manifold Mount w/ Screens	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FKM	20 VDC	50 psid/.065"
910-000047-039	Backordered	POR	15.9 mm	17.0 mm	45.3 mm	63 g	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	0.065 inch	Brass 360 H02	n/a	20 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	1/8 inch Barb for I.D. Tubing	Barb	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Mass Flow Control	Thermally Compensated	18" Wire Leads	40	686.0 mm-Hg to Pressure Rating	50 psi	55 °C	0 °C	1/8" Barbs	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FKM	20 VDC	50 psid/.065"
910-000047-040	Backordered	POR	15.9 mm	0.67 inch	1.79 inch	63 g	2-Way	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	0.065 inch	Brass 360 H02	n/a	20 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Anaesthesia Delivery & Monitors	Thermally Compensated	4-Pin PCB	40	27 Inch-Hg to Pressure Rating	50 psi	55 °C	32 °F	Manifold Mount	Square Body(Manifold and Barb)	PC Board Mount	Brass/FKM	20 VDC	50 psid/.065"
910-000047-042	Backordered	POR	15.9 mm	0.67 inch	45.3 mm	2.2 oz	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	20 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	1/8 inch Barb for I.D. Tubing	Barb	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Ventilators	Thermally Compensated	4-Pin PCB	40	686.0 mm-Hg to Pressure Rating	50 psi	55 °C	0 °C	1/8" Barbs	Square Body(Manifold and Barb)	PC Board Mount	Brass/FKM	20 VDC	50 psid/.065"
910-000047-043	Backordered	POR	0.63 inch	0.67 inch	45.3 mm	63 g	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	0.065 inch	Brass 360 H02	n/a	20 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Oxygen Conservers & Concentrators	Thermally Compensated	Quick Spade	40	27 Inch-Hg to Pressure Rating	3.45 bar	55 °C	32 °F	Manifold Mount	Square Body(Manifold and Barb)	Quick Spade	Brass/FKM	20 VDC	50 psid/.065"
910-000047-045	Backordered	POR	15.9 mm	17.0 mm	1.79 inch	2.2 oz	2-Way	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	20 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	1/8 inch Barb for I.D. Tubing	Barb	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Mass Flow Control	Thermally Compensated	Quick Spade	40	686.0 mm-Hg to Pressure Rating	50 psi	131 °F	0 °C	1/8" Barbs	Square Body(Manifold and Barb)	Quick Spade	Brass/FKM	20 VDC	50 psid/.065"
910-000047-046	Backordered	POR	0.63 inch	0.67 inch	1.79 inch	2.2 oz	2-Way	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	0.065 inch	Brass 360 H02	n/a	29 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Oxygen Conservers & Concentrators	Thermally Compensated	18" Wire Leads	40	27 Inch-Hg to Pressure Rating	50 psi	55 °C	0 °C	Manifold Mount	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FKM	29 VDC	50 psid/.065"
910-000047-047	Backordered	POR	15.9 mm	17.0 mm	1.79 inch	63 g	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	0.065 inch	Brass 360 H02	n/a	29 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount with Screens	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Gas Chromatography	Thermally Compensated	18" Wire Leads	40	686.0 mm-Hg to Pressure Rating	3.45 bar	131 °F	0 °C	Manifold Mount w/ Screens	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FKM	29 VDC	50 psid/.065"
910-000047-048	Backordered	POR	15.9 mm	0.67 inch	45.3 mm	2.2 oz	2-Way	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	29 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	1/8 inch Barb for I.D. Tubing	Barb	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Mass Flow Control	Thermally Compensated	18" Wire Leads	40	686.0 mm-Hg to Pressure Rating	50 psi	55 °C	32 °F	1/8" Barbs	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FKM	29 VDC	50 psid/.065"
910-000047-051	Backordered	POR	15.9 mm	0.67 inch	1.79 inch	63 g	2-Way	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	29 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	1/8 inch Barb for I.D. Tubing	Barb	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Pressure & Flow Control	Thermally Compensated	4-Pin PCB	40	686.0 mm-Hg to Pressure Rating	3.45 bar	131 °F	32 °F	1/8" Barbs	Square Body(Manifold and Barb)	PC Board Mount	Brass/FKM	29 VDC	50 psid/.065"
910-000047-052	Backordered	POR	0.63 inch	0.67 inch	1.79 inch	63 g	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	0.065 inch	Brass 360 H02	n/a	29 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Anesthesia Delivery	Thermally Compensated	Quick Spade	40	686.0 mm-Hg to Pressure Rating	50 psi	55 °C	32 °F	Manifold Mount	Square Body(Manifold and Barb)	Quick Spade	Brass/FKM	29 VDC	50 psid/.065"
910-000047-053	Backordered	POR	15.9 mm	17.0 mm	45.3 mm	2.2 oz	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	0.065 inch	Brass 360 H02	n/a	29 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount with Screens	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Gas Chromatography	Thermally Compensated	Quick Spade	40	27 Inch-Hg to Pressure Rating	50 psi	131 °F	0 °C	Manifold Mount w/ Screens	Square Body(Manifold and Barb)	Quick Spade	Brass/FKM	29 VDC	50 psid/.065"
910-000047-054	Backordered	POR	0.63 inch	0.67 inch	1.79 inch	2.2 oz	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	29 VDC	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	1/8 inch Barb for I.D. Tubing	Barb	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Gas Chromatography	Thermally Compensated	Quick Spade	40	686.0 mm-Hg to Pressure Rating	3.45 bar	55 °C	32 °F	1/8" Barbs	Square Body(Manifold and Barb)	Quick Spade	Brass/FKM	29 VDC	50 psid/.065"
910-000047-075	Backordered	POR	0.63 inch	17.0 mm	1.79 inch	63 g	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	5.5 VDC	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	1/8 inch Barb for I.D. Tubing	Barb	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Ventilators	Thermally Compensated	18" Wire Leads	40	686.0 mm-Hg to Pressure Rating	3.45 bar	131 °F	32 °F	1/8" Barbs	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FFKM	5.5 VDC	50 psid/.065"
910-000047-091	Backordered	POR	0.63 inch	0.67 inch	1.79 inch	2.2 oz	2-Way	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	11.5 VDC	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount with Screens	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Anaesthesia Delivery & Monitors	Thermally Compensated	18" Wire Leads	40	27 Inch-Hg to Pressure Rating	50 psi	55 °C	0 °C	Manifold Mount	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FFKM	11.5 VDC	50 psid/.065"
910-000047-093	Backordered	POR	15.9 mm	0.67 inch	1.79 inch	63 g	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	0.065 inch	Brass 360 H02	n/a	11.5 VDC	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Gas Chromatography	Thermally Compensated	18" Wire Leads	40	686.0 mm-Hg to Pressure Rating	50 psi	55 °C	32 °F	1/8" Barbs	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FFKM	11.5 VDC	50 psid/.065"
910-000047-099	Backordered	POR	15.9 mm	0.67 inch	45.3 mm	2.2 oz	2-Way	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	11.5 VDC	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Mass Flow Control	Thermally Compensated	Quick Spade	40	27 Inch-Hg to Pressure Rating	50 psi	55 °C	0 °C	1/8" Barbs	Square Body(Manifold and Barb)	Quick Spade	Brass/FFKM	11.5 VDC	50 psid/.065"
910-000047-100	Backordered	POR	0.63 inch	0.67 inch	45.3 mm	63 g	2-Way	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	13.5 VDC		FFKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount with Screens	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Gas Chromatography	Thermally Compensated	18" Wire Leads	40	686.0 mm-Hg to Pressure Rating	3.45 bar	131 °F	32 °F	Manifold Mount	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FFKM	13.5 VDC	50 psid/.065"
910-000047-118	Backordered	POR	0.63 inch	0.67 inch	45.3 mm	63 g	Normally Closed (NC)	33 SLPM	< 0.016 cm3/min of Helium @ 150 Psi	1.65 mm	Brass 360 H02	n/a	29 VDC	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	4-40 x 5/8" Pan Head Phillips Screw	Manifold Mount	0.35	33 SLPM	2.0 W Maximum	9	20	100 Million	Precision Fluidics Division	Anesthesia Delivery	Thermally Compensated	18" Wire Leads	40	686.0 mm-Hg to Pressure Rating	3.45 bar	131 °F	32 °F	Manifold Mount	Square Body(Manifold and Barb)	18" Wire Leads	Brass/FFKM	29 VDC	50 psid/.065"

VSO Miniature Proportional Valve

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