VSO Miniature Proportional Valve

*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

The Parker VSO® miniature proportional valve provides enhanced flow control for applications where precise control flow control is required up to 56 slpm. The VSO® valve provides precise flow control of gas in proportion to input current. The valve can be controlled with either DC current or pulse width modulation along with closed loop feedback to deliver optimal system performance. Together with its ability to provide precise control over varying temperatures and media types, the VSO® miniature proportional valve is ideally suited for manufacturers of medical and analytical equipment.

Markets

• Analytical Chemistry

• Anesthesia

• Patient Monitoring

• Respiratory

Features/Benefits

• Enables precise flow control for improved instrument accuracy

• Thermally compensated to maintain precise flow over a wide range of media

• Computer automated calibration and serialization for performance traceability

• Cleaned for Oxygen and Analytical Service use

• Proven performance tested to 100 million life cycles

• Reach, RoHS, ISO 15001, IP65, and CE compliant

Typical Applications

• Gas Chromatography

• Mass Spectrometry

• Ventilators

• 0₂ Concentrators / Conservers

• Anesthesia Delivery and Monitors

• Pressure & Flow Control

• Mass Flow Control

• Insufflator

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SKU	Availability	Price	Division	Shipping Weight	Max Order Quantity	Standard Lead Time	Out of Stock Lead Time	Function	Leak Rate	Configuration	Mounting Type	Seal Material	Actuation Type	Control Method	For Fluid Type	Operation Type	Connection Type	Industry Application	Maximum Operating Pressure	Body Material	Maximum Operating Temperature	Minimum Operating Temperature	Length	Weight	Width	Height	Input Voltage	Cycles per Lifetime	Thermal Compensation	Electrical Connection	Power Consumption	Vacuum to Pressure Range	Flow Rate	Orifice Size	Maximum Flow Rate	Connection Size	Electrical Connection	Body/Elastomer Materials	Maximum Operating Voltage	Maximum Operating Pressure/Orifice Size	Body Style	Pneumatic Connection
910-000053-010	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Pressure & Flow Control	50 psi	Nickel-Plated Brass	55 °C	32 °F	45.3 mm	63 g	0.63 inch	0.67 inch	13.5 VDC	100 Million	Thermally Compensated	18" Wire Leads	2.0 W Maximum	27 Inch-Hg to Pressure Rating	33 SLPM	1.65 mm	33 SLPM	10-32 Female Threaded Ports	18" Wire Leads	Brass/FKM	13.5 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-012	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	Normally Closed (NC)	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Mass Flow Control	50 psi	Nickel-Plated Brass	55 °C	32 °F	45.3 mm	63 g	15.9 mm	17.0 mm	13.5 VDC	100 Million	Thermally Compensated	Quick Spade	2.0 W Maximum	686.0 mm-Hg to Pressure Rating	33 SLPM	1.65 mm	33 SLPM	10-32 Female Threaded Ports	Quick Spade	Brass/FKM	13.5 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-013	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Pressure & Flow Control	3.45 bar	Nickel-Plated Brass	55 °C	0 °C	45.3 mm	63 g	0.63 inch	0.67 inch	20 VDC	100 Million	Thermally Compensated	18" Wire Leads	2.0 W Maximum	27 Inch-Hg to Pressure Rating	33 SLPM	0.065 inch	33 SLPM	10-32 Female Threaded Ports	18" Wire Leads	Brass/FKM	20 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-014	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Gas Chromatography	50 psi	Nickel-Plated Brass	55 °C	0 °C	1.79 inch	2.2 oz	0.63 inch	0.67 inch	20 VDC	100 Million	Thermally Compensated	4-Pin PCB	2.0 W Maximum	27 Inch-Hg to Pressure Rating	33 SLPM	0.065 inch	33 SLPM	10-32 Female Threaded Ports	PC Board Mount	Brass/FKM	20 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-015	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	Normally Closed (NC)	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Ventilators	3.45 bar	Nickel-Plated Brass	131 °F	0 °C	1.79 inch	2.2 oz	0.63 inch	0.67 inch	20 VDC	100 Million	Thermally Compensated	Quick Spade	2.0 W Maximum	686.0 mm-Hg to Pressure Rating	33 SLPM	1.65 mm	33 SLPM	10-32 Female Threaded Ports	Quick Spade	Brass/FKM	20 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-016	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Gas Chromatography	50 psi	Nickel-Plated Brass	131 °F	32 °F	1.79 inch	63 g	0.63 inch	0.67 inch	29 VDC	100 Million	Thermally Compensated	18" Wire Leads	2.0 W Maximum	27 Inch-Hg to Pressure Rating	33 SLPM	1.65 mm	33 SLPM	10-32 Female Threaded Ports	18" Wire Leads	Brass/FKM	29 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-018	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	Normally Closed (NC)	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Oxygen Conservers & Concentrators	3.45 bar	Nickel-Plated Brass	55 °C	32 °F	1.79 inch	2.2 oz	15.9 mm	17.0 mm	29 VDC	100 Million	Thermally Compensated	Quick Spade	2.0 W Maximum	686.0 mm-Hg to Pressure Rating	33 SLPM	1.65 mm	33 SLPM	10-32 Female Threaded Ports	Quick Spade	Brass/FKM	29 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-028	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Mass Flow Control	50 psi	Nickel-Plated Brass	131 °F	32 °F	45.3 mm	63 g	0.63 inch	17.0 mm	8 VDC	100 Million	Thermally Compensated	18" Wire Leads	2.0 W Maximum	686.0 mm-Hg to Pressure Rating	33 SLPM	1.65 mm	33 SLPM	10-32 Female Threaded Ports	18" Wire Leads	Brass/FFKM	8 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-031	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Gas Chromatography	3.45 bar	Nickel-Plated Brass	55 °C	0 °C	1.79 inch	63 g	0.63 inch	17.0 mm	11.5 VDC	100 Million	Thermally Compensated	18" Wire Leads	2.0 W Maximum	27 Inch-Hg to Pressure Rating	33 SLPM	1.65 mm	33 SLPM	10-32 Female Threaded Ports	18" Wire Leads	Brass/FFKM	11.5 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-032	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	Normally Closed (NC)	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Gas Chromatography	3.45 bar	Nickel-Plated Brass	131 °F	0 °C	1.79 inch	2.2 oz	0.63 inch	17.0 mm	11.5 VDC	100 Million	Thermally Compensated	4-Pin PCB	2.0 W Maximum	27 Inch-Hg to Pressure Rating	33 SLPM	1.65 mm	33 SLPM	10-32 Female Threaded Ports	PC Board Mount	Brass/FFKM	11.5 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-034	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Pressure & Flow Control	50 psi	Nickel-Plated Brass	55 °C	32 °F	45.3 mm	2.2 oz	0.63 inch	17.0 mm	13.5 VDC	100 Million	Thermally Compensated	18" Wire Leads	2.0 W Maximum	686.0 mm-Hg to Pressure Rating	33 SLPM	1.65 mm	33 SLPM	10-32 Female Threaded Ports	18" Wire Leads	Brass/FFKM	13.5 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-038	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Anesthesia Delivery	50 psi	Nickel-Plated Brass	131 °F	0 °C	45.3 mm	63 g	0.63 inch	17.0 mm	20 VDC	100 Million	Thermally Compensated	4-Pin PCB	2.0 W Maximum	27 Inch-Hg to Pressure Rating	33 SLPM	0.065 inch	33 SLPM	10-32 Female Threaded Ports	PC Board Mount	Brass/FFKM	20 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-040	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	Normally Closed (NC)	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	Oxygen Conservers & Concentrators	50 psi	Nickel-Plated Brass	131 °F	0 °C	45.3 mm	63 g	0.63 inch	0.67 inch	29 VDC	100 Million	Thermally Compensated	18" Wire Leads	2.0 W Maximum	27 Inch-Hg to Pressure Rating	33 SLPM	0.065 inch	33 SLPM	10-32 Female Threaded Ports	18" Wire Leads	Brass/FFKM	29 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body

VSO Miniature Proportional Valve

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