VSO Miniature Proportional Valve

*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

The Parker VSO® miniature proportional valve provides enhanced flow control for applications where precise control flow control is required up to 56 slpm. The VSO® valve provides precise flow control of gas in proportion to input current. The valve can be controlled with either DC current or pulse width modulation along with closed loop feedback to deliver optimal system performance. Together with its ability to provide precise control over varying temperatures and media types, the VSO® miniature proportional valve is ideally suited for manufacturers of medical and analytical equipment.

Markets

• Analytical Chemistry

• Anesthesia

• Patient Monitoring

• Respiratory

Features/Benefits

• Enables precise flow control for improved instrument accuracy

• Thermally compensated to maintain precise flow over a wide range of media

• Computer automated calibration and serialization for performance traceability

• Cleaned for Oxygen and Analytical Service use

• Proven performance tested to 100 million life cycles

• Reach, RoHS, ISO 15001, IP65, and CE compliant

Typical Applications

• Gas Chromatography

• Mass Spectrometry

• Ventilators

• 0₂ Concentrators / Conservers

• Anesthesia Delivery and Monitors

• Pressure & Flow Control

• Mass Flow Control

• Insufflator

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SKU	Availability	Price	Division	Shipping Weight	Max Order Quantity	Standard Lead Time	Out of Stock Lead Time	Function	Leak Rate	Configuration	Mounting Type	Seal Material	Actuation Type	Control Method	For Fluid Type	Operation Type	Connection Type	Maximum Operating Pressure	Body Material	Maximum Flow Rate	Minimum Operating Temperature	Maximum Operating Temperature	Length	Weight	Width	Input Voltage	Cycles per Lifetime	Thermal Compensation	Electrical Connection	Height	Power Consumption	Industry Application	Vacuum to Pressure Range	Flow Rate	Orifice Size	Connection Size	Electrical Connection	Body/Elastomer Materials	Maximum Operating Voltage	Maximum Operating Pressure/Orifice Size	Body Style	Pneumatic Connection
910-000052-006	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	Normally Closed (NC)	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	100 psi	Nickel-Plated Brass	50 SLPM	0 °C	55 °C	1.79 inch	2.2 oz	15.9 mm	8 VDC	100 Million	Thermally Compensated	Quick Spade	17.0 mm	2.0 W Maximum	Oxygen Conservers & Concentrators	686.0 mm-Hg to Pressure Rating	50 SLPM	1.27 mm	10-32 Female Threaded Ports	Quick Spade	Brass/FKM	8 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-007	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	100 psi	Nickel-Plated Brass	50 SLPM	0 °C	131 °F	1.79 inch	2.2 oz	15.9 mm	11.5 VDC	100 Million	Thermally Compensated	18" Wire Leads	17.0 mm	2.0 W Maximum	Mass Flow Control	27 Inch-Hg to Pressure Rating	50 SLPM	0.050 inch	10-32 Female Threaded Ports	18" Wire Leads	Brass/FKM	11.5 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-008	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	100 psi	Nickel-Plated Brass	50 SLPM	0 °C	55 °C	45.3 mm	63 g	0.63 inch	11.5 VDC	100 Million	Thermally Compensated	4-Pin PCB	0.67 inch	2.0 W Maximum	Anaesthesia Delivery & Monitors	686.0 mm-Hg to Pressure Rating	50 SLPM	0.050 inch	10-32 Female Threaded Ports	PC Board Mount	Brass/FKM	11.5 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-009	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	6.89 bar	Nickel-Plated Brass	50 SLPM	0 °C	55 °C	45.3 mm	63 g	15.9 mm	11.5 VDC	100 Million	Thermally Compensated	Quick Spade	17.0 mm	2.0 W Maximum	Mass Flow Control	686.0 mm-Hg to Pressure Rating	50 SLPM	0.050 inch	10-32 Female Threaded Ports	Quick Spade	Brass/FKM	11.5 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-010	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	6.89 bar	Nickel-Plated Brass	50 SLPM	32 °F	55 °C	45.3 mm	63 g	15.9 mm	13.5 VDC	100 Million	Thermally Compensated	18" Wire Leads	17.0 mm	2.0 W Maximum	Anesthesia Delivery	27 Inch-Hg to Pressure Rating	50 SLPM	0.050 inch	10-32 Female Threaded Ports	18" Wire Leads	Brass/FKM	13.5 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-012	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	6.89 bar	Nickel-Plated Brass	50 SLPM	0 °C	131 °F	45.3 mm	2.2 oz	15.9 mm	13.5 VDC	100 Million	Thermally Compensated	Quick Spade	0.67 inch	2.0 W Maximum	Pressure & Flow Control	27 Inch-Hg to Pressure Rating	50 SLPM	0.050 inch	10-32 Female Threaded Ports	Quick Spade	Brass/FKM	13.5 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-013	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	Normally Closed (NC)	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	100 psi	Nickel-Plated Brass	50 SLPM	32 °F	55 °C	45.3 mm	63 g	0.63 inch	20 VDC	100 Million	Thermally Compensated	18" Wire Leads	0.67 inch	2.0 W Maximum	Anesthesia Delivery	686.0 mm-Hg to Pressure Rating	50 SLPM	0.050 inch	10-32 Female Threaded Ports	18" Wire Leads	Brass/FKM	20 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-014	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	100 psi	Nickel-Plated Brass	50 SLPM	0 °C	55 °C	1.79 inch	2.2 oz	0.63 inch	20 VDC	100 Million	Thermally Compensated	4-Pin PCB	17.0 mm	2.0 W Maximum	Ventilators	686.0 mm-Hg to Pressure Rating	50 SLPM	1.27 mm	10-32 Female Threaded Ports	PC Board Mount	Brass/FKM	20 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-015	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	100 psi	Nickel-Plated Brass	50 SLPM	32 °F	55 °C	45.3 mm	63 g	15.9 mm	20 VDC	100 Million	Thermally Compensated	Quick Spade	17.0 mm	2.0 W Maximum	Oxygen Conservers & Concentrators	686.0 mm-Hg to Pressure Rating	50 SLPM	1.27 mm	10-32 Female Threaded Ports	Quick Spade	Brass/FKM	20 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-016	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	100 psi	Nickel-Plated Brass	50 SLPM	0 °C	55 °C	1.79 inch	63 g	15.9 mm	29 VDC	100 Million	Thermally Compensated	18" Wire Leads	0.67 inch	2.0 W Maximum	Mass Flow Control	27 Inch-Hg to Pressure Rating	50 SLPM	0.050 inch	10-32 Female Threaded Ports	18" Wire Leads	Brass/FKM	29 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-018	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	100 psi	Nickel-Plated Brass	50 SLPM	0 °C	55 °C	1.79 inch	63 g	0.63 inch	29 VDC	100 Million	Thermally Compensated	Quick Spade	17.0 mm	2.0 W Maximum	Gas Chromatography	27 Inch-Hg to Pressure Rating	50 SLPM	0.050 inch	10-32 Female Threaded Ports	Quick Spade	Brass/FKM	29 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-019	Backordered	POR	Precision Fluidics Division																																1.27 mm		18" Wire Leads	Brass/FKM	41 VDC	100 psid/.050"	10-32 Female Thread Body	10-32 Female Thread Body
910-000052-034	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	Normally Closed (NC)	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	100 psi	Nickel-Plated Brass	50 SLPM	0 °C	55 °C	45.3 mm	2.2 oz	15.9 mm	13.5 VDC	100 Million	Thermally Compensated	18" Wire Leads	17.0 mm	2.0 W Maximum	Oxygen Conservers & Concentrators	686.0 mm-Hg to Pressure Rating	50 SLPM	1.27 mm	10-32 Female Threaded Ports	18" Wire Leads	Brass/FFKM	13.5 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000052-040	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FFKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	6.89 bar	Nickel-Plated Brass	50 SLPM	0 °C	55 °C	45.3 mm	63 g	15.9 mm	29 VDC	100 Million	Thermally Compensated	18" Wire Leads	0.67 inch	2.0 W Maximum	Anesthesia Delivery	686.0 mm-Hg to Pressure Rating	50 SLPM	0.050 inch	10-32 Female Threaded Ports	18" Wire Leads	Brass/FFKM	29 VDC	100 psid/.050"	10-32 Female Threads	10-32 Female Thread Body
910-000053-001	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	Normally Closed (NC)	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	3.45 bar	Nickel-Plated Brass	33 SLPM	32 °F	55 °C	1.79 inch	63 g	0.63 inch	5.5 VDC	100 Million	Thermally Compensated	18" Wire Leads	17.0 mm	2.0 W Maximum	Anaesthesia Delivery & Monitors	27 Inch-Hg to Pressure Rating	33 SLPM	1.65 mm	10-32 Female Threaded Ports	18" Wire Leads	Brass/FKM	5.5 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-004	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	50 psi	Nickel-Plated Brass	33 SLPM	0 °C	55 °C	45.3 mm	2.2 oz	15.9 mm	8 VDC	100 Million	Thermally Compensated	18" Wire Leads	17.0 mm	2.0 W Maximum	Ventilators	27 Inch-Hg to Pressure Rating	33 SLPM	1.65 mm	10-32 Female Threaded Ports	18" Wire Leads	Brass/FKM	8 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-006	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	50 psi	Nickel-Plated Brass	33 SLPM	0 °C	55 °C	45.3 mm	2.2 oz	15.9 mm	8 VDC	100 Million	Thermally Compensated	Quick Spade	0.67 inch	2.0 W Maximum	Anesthesia Delivery	686.0 mm-Hg to Pressure Rating	33 SLPM	1.65 mm	10-32 Female Threaded Ports	Quick Spade	Brass/FKM	8 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-007	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a		FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	3.45 bar	Nickel-Plated Brass	33 SLPM	0 °C	55 °C	1.79 inch	63 g	15.9 mm	11.5 VDC	100 Million	Thermally Compensated	18" Wire Leads	17.0 mm	2.0 W Maximum	Ventilators	27 Inch-Hg to Pressure Rating	33 SLPM	0.065 inch	10-32 Female Threaded Ports	18" Wire Leads	Brass/FKM	11.5 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-008	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	3.45 bar	Nickel-Plated Brass	33 SLPM	32 °F	55 °C	45.3 mm	63 g	15.9 mm	11.5 VDC	100 Million	Thermally Compensated	4-Pin PCB	0.67 inch	2.0 W Maximum	Pressure & Flow Control	686.0 mm-Hg to Pressure Rating	33 SLPM	0.065 inch	10-32 Female Threaded Ports	PC Board Mount	Brass/FKM	11.5 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body
910-000053-009	Backordered	POR	Precision Fluidics Division	0.35	9	20	40	2-Way	< 0.016 cm3/min of Helium @ 150 Psi	n/a	Mounting Screw	FKM	Solenoid	Current or Voltage	Gases	Electronic	Threaded Port	50 psi	Nickel-Plated Brass	33 SLPM	0 °C	55 °C	1.79 inch	63 g	0.63 inch	11.5 VDC	100 Million	Thermally Compensated	Quick Spade	0.67 inch	2.0 W Maximum	Gas Chromatography	686.0 mm-Hg to Pressure Rating	33 SLPM	1.65 mm	10-32 Female Threaded Ports	Quick Spade	Brass/FKM	11.5 VDC	50 psid/.065"	10-32 Female Threads	10-32 Female Thread Body

VSO Miniature Proportional Valve

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